{"id":192,"date":"2023-07-09T00:48:30","date_gmt":"2023-07-08T15:48:30","guid":{"rendered":"https:\/\/freely4000.com\/?p=192"},"modified":"2023-07-09T00:52:21","modified_gmt":"2023-07-08T15:52:21","slug":"tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc","status":"publish","type":"post","link":"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/","title":{"rendered":"TMA(Trimethyl Aluminium): \uc0b0\uc5c5 \uc751\uc6a9 \ubd84\uc57c\uc758 \ud544\uc218 \ud654\ud569\ubb3c"},"content":{"rendered":"\n<div id=\"ez-toc-container\" class=\"ez-toc-v2_0_67_1 ez-toc-wrap-center counter-hierarchy ez-toc-counter ez-toc-light-blue ez-toc-container-direction\">\n<div class=\"ez-toc-title-container\">\n<p class=\"ez-toc-title \" >\uc26c\uc6b4 \ubaa9\ucc28<\/p>\n<span class=\"ez-toc-title-toggle\"><a href=\"#\" class=\"ez-toc-pull-right ez-toc-btn ez-toc-btn-xs ez-toc-btn-default ez-toc-toggle\" aria-label=\"Toggle Table of Content\"><span class=\"ez-toc-js-icon-con\"><span class=\"\"><span class=\"eztoc-hide\" style=\"display:none;\">Toggle<\/span><span class=\"ez-toc-icon-toggle-span\"><svg style=\"fill: #000000;color:#000000\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\" class=\"list-377408\" width=\"20px\" height=\"20px\" viewBox=\"0 0 24 24\" fill=\"none\"><path d=\"M6 6H4v2h2V6zm14 0H8v2h12V6zM4 11h2v2H4v-2zm16 0H8v2h12v-2zM4 16h2v2H4v-2zm16 0H8v2h12v-2z\" fill=\"currentColor\"><\/path><\/svg><svg style=\"fill: #000000;color:#000000\" class=\"arrow-unsorted-368013\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\" width=\"10px\" height=\"10px\" viewBox=\"0 0 24 24\" version=\"1.2\" baseProfile=\"tiny\"><path d=\"M18.2 9.3l-6.2-6.3-6.2 6.3c-.2.2-.3.4-.3.7s.1.5.3.7c.2.2.4.3.7.3h11c.3 0 .5-.1.7-.3.2-.2.3-.5.3-.7s-.1-.5-.3-.7zM5.8 14.7l6.2 6.3 6.2-6.3c.2-.2.3-.5.3-.7s-.1-.5-.3-.7c-.2-.2-.4-.3-.7-.3h-11c-.3 0-.5.1-.7.3-.2.2-.3.5-.3.7s.1.5.3.7z\"\/><\/svg><\/span><\/span><\/span><\/a><\/span><\/div>\n<nav><ul class='ez-toc-list ez-toc-list-level-1 eztoc-toggle-hide-by-default' ><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-1\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#TMATrimethyl_Aluminium_%EC%82%B0%EC%97%85_%EC%9D%91%EC%9A%A9_%EB%B6%84%EC%95%BC%EC%9D%98_%ED%95%84%EC%88%98_%ED%99%94%ED%95%A9%EB%AC%BC\" title=\"TMA(Trimethyl Aluminium): \uc0b0\uc5c5 \uc751\uc6a9 \ubd84\uc57c\uc758 \ud544\uc218 \ud654\ud569\ubb3c\">TMA(Trimethyl Aluminium): \uc0b0\uc5c5 \uc751\uc6a9 \ubd84\uc57c\uc758 \ud544\uc218 \ud654\ud569\ubb3c<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-2\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#%EC%86%8C%EA%B0%9C\" title=\"\uc18c\uac1c\">\uc18c\uac1c<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-3\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#TMA%EB%9E%80_%EB%AC%B4%EC%97%87%EC%9E%85%EB%8B%88%EA%B9%8C\" title=\"TMA\ub780 \ubb34\uc5c7\uc785\ub2c8\uae4c?\">TMA\ub780 \ubb34\uc5c7\uc785\ub2c8\uae4c?<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-4\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#TMA%EC%9D%98_%EC%86%8D%EC%84%B1\" title=\"TMA\uc758 \uc18d\uc131\">TMA\uc758 \uc18d\uc131<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-5\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#TMA%EC%9D%98_%EC%82%B0%EC%97%85%EC%A0%81_%EC%9A%A9%EB%8F%84\" title=\"TMA\uc758 \uc0b0\uc5c5\uc801 \uc6a9\ub3c4\">TMA\uc758 \uc0b0\uc5c5\uc801 \uc6a9\ub3c4<\/a><ul class='ez-toc-list-level-3' ><li class='ez-toc-heading-level-3'><a class=\"ez-toc-link ez-toc-heading-6\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#%EC%B4%89%EB%A7%A4_%EC%9E%91%EC%9A%A9\" title=\"\ucd09\ub9e4 \uc791\uc6a9\">\ucd09\ub9e4 \uc791\uc6a9<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-3'><a class=\"ez-toc-link ez-toc-heading-7\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#%ED%99%94%ED%95%99_%EA%B8%B0%EC%83%81_%EC%A6%9D%EC%B0%A9CVD\" title=\"\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)\">\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-3'><a class=\"ez-toc-link ez-toc-heading-8\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#%EB%B0%98%EB%8F%84%EC%B2%B4_%EC%A0%9C%EC%A1%B0\" title=\"\ubc18\ub3c4\uccb4 \uc81c\uc870\">\ubc18\ub3c4\uccb4 \uc81c\uc870<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-3'><a class=\"ez-toc-link ez-toc-heading-9\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#%EC%A0%9C%EC%95%BD_%EC%82%B0%EC%97%85\" title=\"\uc81c\uc57d \uc0b0\uc5c5\">\uc81c\uc57d \uc0b0\uc5c5<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-3'><a class=\"ez-toc-link ez-toc-heading-10\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#%EC%9C%A0%EA%B8%B0_%ED%95%A9%EC%84%B1\" title=\"\uc720\uae30 \ud569\uc131\">\uc720\uae30 \ud569\uc131<\/a><\/li><\/ul><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-11\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#TMA%EC%9D%98_%EC%95%88%EC%A0%84_%EA%B3%A0%EB%A0%A4_%EC%82%AC%ED%95%AD\" title=\"TMA\uc758 \uc548\uc804 \uace0\ub824 \uc0ac\ud56d\">TMA\uc758 \uc548\uc804 \uace0\ub824 \uc0ac\ud56d<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-12\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#TMA_%EC%B7%A8%EA%B8%89_%EB%B0%8F_%EB%B3%B4%EA%B4%80\" title=\"TMA \ucde8\uae09 \ubc0f \ubcf4\uad00\">TMA \ucde8\uae09 \ubc0f \ubcf4\uad00<\/a><\/li><li class='ez-toc-page-1 ez-toc-heading-level-2'><a class=\"ez-toc-link ez-toc-heading-13\" href=\"https:\/\/freely4000.com\/tmatrimethyl-aluminium-%ec%82%b0%ec%97%85-%ec%9d%91%ec%9a%a9-%eb%b6%84%ec%95%bc%ec%9d%98-%ed%95%84%ec%88%98-%ed%99%94%ed%95%a9%eb%ac%bc\/#TMATrimethyl_Aluminium%EC%9D%98_%EB%8C%80%ED%91%9C%EC%A0%81%EC%9D%B8_%EC%83%9D%EC%82%B0_%EC%A7%80%EC%97%AD%EA%B3%BC_%EC%83%9D%EC%82%B0%EC%97%85%EC%B2%B4\" title=\"TMA(Trimethyl Aluminium)\uc758 \ub300\ud45c\uc801\uc778 \uc0dd\uc0b0 \uc9c0\uc5ed\uacfc \uc0dd\uc0b0\uc5c5\uccb4\">TMA(Trimethyl Aluminium)\uc758 \ub300\ud45c\uc801\uc778 \uc0dd\uc0b0 \uc9c0\uc5ed\uacfc \uc0dd\uc0b0\uc5c5\uccb4<\/a><\/li><\/ul><\/nav><\/div>\n<h2 class=\"wp-block-heading has-vivid-cyan-blue-color has-text-color\"><span class=\"ez-toc-section\" id=\"TMATrimethyl_Aluminium_%EC%82%B0%EC%97%85_%EC%9D%91%EC%9A%A9_%EB%B6%84%EC%95%BC%EC%9D%98_%ED%95%84%EC%88%98_%ED%99%94%ED%95%A9%EB%AC%BC\"><\/span>TMA(Trimethyl Aluminium): \uc0b0\uc5c5 \uc751\uc6a9 \ubd84\uc57c\uc758 \ud544\uc218 \ud654\ud569\ubb3c<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>TMA\ub85c \uc57d\uce6d\ub418\ub294 \ud2b8\ub9ac\uba54\ud2f8 \uc54c\ub8e8\ubbf8\ub284\uc740 \ud654\ud559\uc2dd Al(CH3)3\uc744 \uac16\ub294 \uc720\uae30 \uae08\uc18d \ud654\ud569\ubb3c\uc785\ub2c8\ub2e4. \uc774\uac83\uc740 \ubc18\uc751\uc131\uc774 \ub192\uace0 \ubc1c\ud654\uc131\uc778 \ubb34\uc0c9 \uc561\uccb4\ub85c, \uacf5\uae30\ub098 \uc2b5\uae30\uac00 \uc788\ub294 \uacf3\uc5d0\uc11c \uc790\ubc1c\uc801\uc73c\ub85c \ubc1c\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>TMA\ub294 \uc8fc\ub85c \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \ubc15\ub9c9 \uc0dd\uc0b0\uc758 \uc804\uad6c\uccb4\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774\ub294 \ubc18\ub3c4\uccb4 \uae30\ud310\uc5d0 \uace0\ud488\uc9c8 \uc54c\ub8e8\ubbf8\ub284 \ud568\uc720 \ud544\ub984\uc744 \uc99d\ucc29\ud558\ub294 \ub370 \uc0ac\uc6a9\ub418\ub294 \uae08\uc18d-\uc720\uae30 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(MOCVD) \uacf5\uc815\uc758 \ud575\uc2ec \uad6c\uc131 \uc694\uc18c\uc785\ub2c8\ub2e4. \uc9d1\uc801\ud68c\ub85c, LED, \ud0dc\uc591\uc804\uc9c0 \ub4f1 \ub2e4\uc591\ud55c \uc804\uc790\uc18c\uc790\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ud544\ub984\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\ubc18\uc751\uc131\uc73c\ub85c \uc778\ud574 TMA\ub294 \uc8fc\uc758 \uae4a\uc740 \ucde8\uae09 \ubc0f \ubcf4\uad00\uc774 \ud544\uc694\ud569\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc73c\ub85c \uc2b5\uae30 \ub610\ub294 \uc0b0\uc18c\uc640\uc758 \uc811\ucd09\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uc9c8\uc18c \ub610\ub294 \uc544\ub974\uace4\uacfc \uac19\uc740 \ubd88\ud65c\uc131 \ubd84\uc704\uae30\uc5d0\uc11c \ubc00\ud3d0 \uc6a9\uae30\uc5d0 \ubcf4\uad00\ub429\ub2c8\ub2e4. \uac74\uc870\ud558\uace0 \ubb34\uc0b0\uc18c \ud658\uacbd\uc744 \uc0ac\uc6a9\ud558\ub294 \uac83\uacfc \uac19\uc740 \ud2b9\ubcc4\ud55c \uc608\ubc29 \uc870\uce58\ub294 \uc7a0\uc7ac\uc801\uc778 \uc704\ud5d8\uc744 \ud53c\ud558\uae30 \uc704\ud574 \uc6b4\uc1a1 \ubc0f \uc0ac\uc6a9 \uc911\uc5d0 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p>TMA\ub294 \uac00\uc5f0\uc131 \ubc0f \ub3c5\uc131\uc73c\ub85c \uc778\ud574 \uc2ec\uac01\ud55c \uc548\uc804 \uc704\ud5d8\uc744 \ucd08\ub798\ud569\ub2c8\ub2e4. \uadf8\uac83\uc758 \uc790\uc5f0 \ubc1c\ud654\uc131\uc73c\ub85c \uc778\ud574 \uacf5\uae30\uac00 \uc788\uc744 \ub54c \ubc18\uc751\uc131\uc774 \ub9e4\uc6b0 \ub192\uace0 \uc7a0\uc7ac\uc801\uc73c\ub85c \ud3ed\ubc1c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c TMA\ub85c \uc791\uc5c5\ud560 \ub54c\ub294 \uc801\uc808\ud55c \ubcf4\ud638 \uc7a5\ube44\uc758 \uc0ac\uc6a9 \ubc0f \ud655\ub9bd\ub41c \ucde8\uae09 \uc808\ucc28 \uc900\uc218\uc640 \uac19\uc740 \uc5c4\uaca9\ud55c \uc548\uc804 \ud504\ub85c\ud1a0\ucf5c\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p>TMA\ub294 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0 \uc801\uc6a9\ub418\ub294 \uac83 \uc678\uc5d0\ub3c4 \ub2e4\ub978 \ubd84\uc57c\uc5d0\uc11c\ub3c4 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc720\uae30 \ud569\uc131, \ud2b9\ud788 \uce74\ub974\ubcf4\ub2d0 \ud654\ud569\ubb3c\uacfc \uad00\ub828\ub41c \ubc18\uc751\uc5d0\uc11c \ud658\uc6d0\uc81c\ub85c \uc791\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. TMA\ub294 \ub610\ud55c \ud2b9\uc815 \ud654\ud559 \ubc18\uc751\uc5d0\uc11c \ucd09\ub9e4\ub85c \uc0ac\uc6a9\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>TMA\ub294 \uc804\uc790 \uc7a5\uce58\uc758 \uc81c\uc870 \uacf5\uc815, \ud2b9\ud788 \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uace0\uc720\ud55c \ud2b9\uc131\uacfc \ubc18\uc751\uc131\uc73c\ub85c \uc778\ud574 \uc54c\ub8e8\ubbf8\ub284 \ud568\uc720 \ubc15\ub9c9 \uc99d\ucc29\uc744 \uc704\ud55c \uadc0\uc911\ud55c \uc804\uad6c\uccb4\uac00 \ub429\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \ucde8\uae09 \uc2dc \uc778\ud654\uc131 \ubc0f \ub3c5\uc131\uacfc \uad00\ub828\ub41c \uc7a0\uc7ac\uc801 \uc704\ud5d8\uc744 \uc644\ud654\ud558\uae30 \uc704\ud574 \uc548\uc804 \uc808\ucc28\uc5d0 \uc8fc\uc758\ub97c \uae30\uc6b8\uc5ec\uc57c \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading has-vivid-cyan-blue-color has-text-color\"><span class=\"ez-toc-section\" id=\"%EC%86%8C%EA%B0%9C\"><\/span>\uc18c\uac1c<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>\uc0b0\uc5c5 \ud654\ud559 \uc601\uc5ed\uc5d0\uc11c \uc218\ub9ce\uc740 \ud654\ud569\ubb3c\uc774 \ub2e4\uc591\ud55c \ud504\ub85c\uc138\uc2a4\uc640 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud654\ud569\ubb3c \uc911 \ud558\ub098\ub294 TMA \ub610\ub294 \ud2b8\ub9ac\uba54\ud2f8 \uc54c\ub8e8\ubbf8\ub284\uc785\ub2c8\ub2e4. TMA\ub294 \uace0\uc720\ud55c \ud2b9\uc131\uacfc \ubc18\uc751\uc131\uc73c\ub85c \uc778\ud574 \uc5ec\ub7ec \uc0b0\uc5c5 \ubd84\uc57c\uc5d0\uc11c \uc751\uc6a9\ub418\ub294 \ub2e4\ubaa9\uc801 \ubb3c\uc9c8\uc785\ub2c8\ub2e4. TMA\uc758 \uc18d\uc131, \uc0b0\uc5c5 \uc6a9\ub3c4, \uc548\uc804 \uace0\ub824 \uc0ac\ud56d, \uc801\uc808\ud55c \ucde8\uae09 \ubc0f \ubcf4\uad00 \uae30\uc220\uc5d0 \ub300\ud574 \ub17c\uc758\ud558\uba74\uc11c TMA\uc5d0 \ub300\ud55c \uc2ec\uce35 \ud0d0\uad6c\ub97c \uc81c\uacf5\ud558\ub294 \uac83\uc744 \ubaa9\ud45c\ub85c \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading has-vivid-cyan-blue-color has-text-color\"><span class=\"ez-toc-section\" id=\"TMA%EB%9E%80_%EB%AC%B4%EC%97%87%EC%9E%85%EB%8B%88%EA%B9%8C\"><\/span>TMA\ub780 \ubb34\uc5c7\uc785\ub2c8\uae4c?<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>TMA \ub610\ub294 \ud2b8\ub9ac\uba54\ud2f8 \uc54c\ub8e8\ubbf8\ub284\uc740 \ud654\ud559\uc2dd Al(CH\u2083)\u2083\uc744 \uac16\ub294 \uc720\uae30 \uae08\uc18d \ud654\ud569\ubb3c\uc785\ub2c8\ub2e4. \uc774\uac83\uc740 3\uac1c\uc758 \uba54\ud2f8 \uadf8\ub8f9\uc5d0 \uacb0\ud569\ub41c \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc790\ub85c \uad6c\uc131\ub418\uc5b4 \ub2e4\uc591\ud55c \uc54c\ub8e8\ubbf8\ub284 \ud568\uc720 \ud654\ud569\ubb3c\uc758 \ud569\uc131\uc5d0 \ud544\uc218\uc801\uc778 \uc804\uad6c\uccb4\uac00 \ub429\ub2c8\ub2e4. TMA\ub294 \ud2b9\uc720\uc758 \uc790\uadf9\uc801\uc778 \ub0c4\uc0c8\uac00 \ub098\ub294 \ubb34\uc0c9 \uc561\uccb4\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading has-vivid-cyan-blue-color has-text-color\"><span class=\"ez-toc-section\" id=\"TMA%EC%9D%98_%EC%86%8D%EC%84%B1\"><\/span>TMA\uc758 \uc18d\uc131<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>TMA\ub294 \uad11\ubc94\uc704\ud55c \uc751\uc6a9 \ubd84\uc57c\uc5d0 \uae30\uc5ec\ud558\ub294 \uba87 \uac00\uc9c0 \uc8fc\ubaa9\ud560\ub9cc\ud55c \ud2b9\uc131\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \ubc18\uc751\uc131\uc774 \ub192\uace0 \ubc1c\ud654\uc131\uc774 \uc788\uc73c\uba70 \uacf5\uae30\uc5d0 \ub178\ucd9c\ub418\uba74 \uc790\ubc1c\uc801\uc73c\ub85c \ubc1c\ud654\ud569\ub2c8\ub2e4. \ub610\ud55c TMA\ub294 \uc810\ub3c4\uac00 \ub0ae\uace0 \ub053\ub294\uc810\uc774 \ub0ae\uc73c\uba70 \uc5f4 \uc548\uc815\uc131\uc774 \uc6b0\uc218\ud558\uc5ec \ub2e4\uc591\ud55c \ud654\ud559 \uacf5\uc815\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p>TMA(Trimethyl Aluminium)\uc758 \ud654\ud559\uc801 \ud2b9\uc131\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul>\n<li>\ubc18\uc751\uc131: TMA\ub294 \ub2e4\uc591\ud55c \ud654\ud559\uc885\uc5d0 \ub300\ud574 \ubc18\uc751\uc131\uc774 \ub192\uc2b5\ub2c8\ub2e4. \uadf8\uac83\uc740 \ubb3c, \uc0b0\uc18c \ubc0f \uae30\ud0c0 \ubc18\uc751\uc131 \ud654\ud569\ubb3c\uacfc \uc27d\uac8c \ubc18\uc751\ud558\uc5ec \uc218\ub9ce\uc740 \ud654\ud559 \ubc18\uc751\uc5d0\uc11c \uadc0\uc911\ud55c \uc2dc\uc57d\uc774 \ub429\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uac00\uc218\ubd84\ud574: TMA\ub294 \uc218\ubd84\uc5d0 \ub178\ucd9c\ub418\uba74 \uac00\uc218\ubd84\ud574\ub418\uc5b4 \ubb3c\uacfc \ubc18\uc751\ud558\uc5ec \uc218\uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284\uacfc \uac00\uc5f0\uc131 \uba54\ud0c4 \uac00\uc2a4\ub97c \uc0dd\uc131\ud569\ub2c8\ub2e4. \uc774 \ubc18\uc751\uc740 \ubc1c\uc5f4 \ubc18\uc751\uc774\uba70 \uc6d0\uce58 \uc54a\ub294 \ubc18\uc751\uc744 \ubc29\uc9c0\ud558\uace0 \uc548\uc804\uc744 \ubcf4\uc7a5\ud558\uae30 \uc704\ud55c \uc608\ubc29 \uc870\uce58\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc54c\ud0ac\ud654: TMA\ub294 \uba54\ud2f8\uae30\ub97c \ub2e4\ub978 \ud654\ud569\ubb3c\ub85c \uc804\ub2ec\ud558\ub294 \uc54c\ud0ac\ud654 \ubc18\uc751\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774 \uc18d\uc131\uc740 \ubcf5\uc7a1\ud55c \uc720\uae30 \ubd84\uc790\uc758 \ud569\uc131\uc5d0\uc11c \uc911\uc694\ud55c \uc2dc\uc57d\uc774 \ub429\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ub8e8\uc774\uc2a4\uc0b0: TMA\ub294 \ub8e8\uc774\uc2a4\uc0b0\uc73c\ub85c \uc791\uc6a9\ud569\ub2c8\ub2e4. \uc989, \ud654\ud559 \ubc18\uc751 \uc911\uc5d0 \ub8e8\uc774\uc2a4 \uc5fc\uae30\ub85c\ubd80\ud130 \uc804\uc790\uc30d\uc744 \ubc1b\uc544\ub4e4\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ud2b9\uc131\uc73c\ub85c \uc778\ud574 \ubc30\uc704 \ucc29\ubb3c \ubc0f \ucd09\ub9e4 \ubc18\uc751\uc5d0 \ucc38\uc5ec\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc0b0\ud654 \ud658\uc6d0 \ubc18\uc751: TMA\ub294 \uc0b0\ud654 \ud658\uc6d0 \uacfc\uc815\uc5d0\uc11c \uc804\uc790 \uacf5\uc5ec\uccb4 \ub610\ub294 \uc218\uc6a9\uccb4 \uc5ed\ud560\uc744 \ud558\ub294 \uc0b0\ud654 \ud658\uc6d0 \ubc18\uc751\uc744 \uacaa\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc804\uc790\ub97c \uae30\uc99d\ud558\uac70\ub098 \ubc1b\uc544\ub4e4\uc774\ub294 \ub2a5\ub825\uc740 \ub2e4\uc591\ud55c \ud654\ud559\uc801 \ubcc0\ud615\uc5d0\uc11c \ub2e4\uc7ac\ub2e4\ub2a5\ud568\uc5d0 \uae30\uc5ec\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ucd09\ub9e4 \ud65c\uc131: TMA\ub294 \ucd09\ub9e4 \ud65c\uc131\uc744 \ub098\ud0c0\ub0b4\uc5b4 \ud65c\uc131\ud654 \uc5d0\ub108\uc9c0\ub97c \ub0ae\ucda4\uc73c\ub85c\uc368 \ud2b9\uc815 \ud654\ud559 \ubc18\uc751\uc744 \ucd09\uc9c4\ud569\ub2c8\ub2e4. \uc911\ud569 \ubc0f \uc720\uae30 \ud569\uc131\uacfc \uac19\uc740 \ucd09\ub9e4 \uc791\uc6a9\uc5d0 \ud2b9\ud788 \ud6a8\uacfc\uc801\uc785\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ub9ac\uac04\ub4dc \uad50\ud658: TMA\ub294 \ubc30\uc704 \ucc29\ubb3c\uc5d0\uc11c \ub2e4\ub978 \ub9ac\uac04\ub4dc\ub97c \ub300\uccb4\ud558\ub294 \ub9ac\uac04\ub4dc \uad50\ud658 \ubc18\uc751\uc744 \uacaa\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uc18d\uc131\uc740 \ub2e4\ub978 \uc18d\uc131\uc744 \uac00\uc9c4 \uc0c8\ub85c\uc6b4 \ubc30\uc704 \ud654\ud569\ubb3c\uc758 \ud615\uc131\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n<p>TMA\uc758 \uc774\ub7ec\ud55c \ud654\ud559\uc801 \ud2b9\uc131\uc744 \uc774\ud574\ud558\ub294 \uac83\uc740 \ud654\ud559 \ud569\uc131, \ucd09\ub9e4 \uc791\uc6a9 \ubc0f \uae30\ud0c0 \uc0b0\uc5c5 \uacf5\uc815\uc5d0\uc11c TMA\ub97c \ud6a8\uacfc\uc801\uc73c\ub85c \ud65c\uc6a9\ud558\ub294 \ub370 \uc911\uc694\ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uc801\uc808\ud55c \uc548\uc804 \uc870\uce58 \ubc0f \uc9c0\uce68\uc5d0 \ub530\ub77c TMA\uc758 \ubc18\uc751\uc131 \ubc0f \uc790\uc5f0 \ubc1c\ud654\uc131\uc73c\ub85c \uc778\ud574 \uc8fc\uc758\ud574\uc11c \ucde8\uae09\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading has-vivid-cyan-blue-color has-text-color\"><span class=\"ez-toc-section\" id=\"TMA%EC%9D%98_%EC%82%B0%EC%97%85%EC%A0%81_%EC%9A%A9%EB%8F%84\"><\/span>TMA\uc758 \uc0b0\uc5c5\uc801 \uc6a9\ub3c4<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>TMA\ub294 \ub2e4\uc591\ud55c \uc0b0\uc5c5\uc5d0\uc11c \uad11\ubc94\uc704\ud558\uac8c \uc0ac\uc6a9\ub418\uba70 \uc5ec\ub7ec \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \uc911\uc694\ud55c \uad6c\uc131 \uc694\uc18c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. TMA\uc758 \uc8fc\uc694 \uc751\uc6a9 \ubd84\uc57c \uc911 \uc77c\ubd80\ub97c \uc0b4\ud3b4\ubcf4\uaca0\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"%EC%B4%89%EB%A7%A4_%EC%9E%91%EC%9A%A9\"><\/span>\ucd09\ub9e4 \uc791\uc6a9<span class=\"ez-toc-section-end\"><\/span><\/h3>\n\n\n\n<p>TMA\ub294 \uc218\ub9ce\uc740 \ud654\ud559 \ubc18\uc751\uc5d0\uc11c \uac15\ub825\ud55c \ucd09\ub9e4 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \ubc18\uc751\uc744 \ud65c\uc131\ud654\ud558\uace0 \ucd09\uc9c4\ud558\ub294 \ub2a5\ub825\uc740 \uc11d\uc720 \ud654\ud559 \uc815\uc81c, \uc911\ud569 \ubc0f \uc81c\uc57d \uc81c\uc870\uc640 \uad00\ub828\ub41c \uc0b0\uc5c5\uc5d0 \uc774\uc0c1\uc801\uc778 \uc120\ud0dd\uc785\ub2c8\ub2e4.<br>TMA\ub294 \ub6f0\uc5b4\ub09c \ucd09\ub9e4 \ud2b9\uc131\uc744 \ub098\ud0c0\ub0b4\ubbc0\ub85c \ub2e4\uc591\ud55c \uc0b0\uc5c5 \uacf5\uc815\uc5d0\uc11c \uadc0\uc911\ud55c \ud654\ud569\ubb3c\uc774 \ub429\ub2c8\ub2e4. TMA\uac00 \ucd09\ub9e4 \uc5ed\ud560\uc744 \ud558\ub294 \ubc29\ubc95\uc744 \uc0b4\ud3b4\ubcf4\uaca0\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>TMA(Trimethyl Aluminium)\uc758 \ucd09\ub9e4 \ud2b9\uc131\uc5d0 \ub300\ud55c \uc815\ubcf4\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>TMA\ub294 \ub6f0\uc5b4\ub09c \ucd09\ub9e4 \ud2b9\uc131\uc744 \ub098\ud0c0\ub0b4\ubbc0\ub85c \ub2e4\uc591\ud55c \uc0b0\uc5c5 \uacf5\uc815\uc5d0\uc11c \uadc0\uc911\ud55c \ud654\ud569\ubb3c\uc774 \ub429\ub2c8\ub2e4. TMA\uac00 \ucd09\ub9e4 \uc5ed\ud560\uc744 \ud558\ub294 \ubc29\ubc95\uc744 \uc0b4\ud3b4\ubcf4\uaca0\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul>\n<li>\ubc18\uc751 \ud65c\uc131\ud654: TMA\ub294 \ubc18\uc751\uc774 \uc77c\uc5b4\ub098\uae30\uc5d0 \uc801\ud569\ud55c \ud658\uacbd\uc744 \uc81c\uacf5\ud568\uc73c\ub85c\uc368 \ud2b9\uc815 \ud654\ud559 \ubc18\uc751\uc744 \ud65c\uc131\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubc18\uc751\uc774 \uc9c4\ud589\ub418\ub294 \ub370 \ud544\uc694\ud55c \ud65c\uc131\ud654 \uc5d0\ub108\uc9c0\ub97c \ub0ae\ucd94\uc5b4 \ubc18\uc751 \uc18d\ub3c4\ub97c \ub192\uc774\ub294 \ucd09\ub9e4 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uade0\uc9c8 \ucd09\ub9e4 \uc791\uc6a9: TMA\ub294 \uc885\uc885 \uade0\uc77c \ucd09\ub9e4\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc989, \ubc18\uc751\ubb3c\uacfc \ub3d9\uc77c\ud55c \uc0c1\uc5d0 \uc788\uc74c\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4. \uadf8\uac83\uc740 \ubc18\uc751 \uc6a9\ub9e4\uc5d0 \uc27d\uac8c \uc6a9\ud574\ub418\uace0 \ubc18\uc751\uc131 \uc911\uac04\uccb4\ub97c \ud615\uc131\ud558\uc5ec \uc6d0\ud558\ub294 \ud654\ud559\uc801 \ubcc0\ud615\uc744 \ucd09\uc9c4\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc911\ud569: TMA\ub294 \uc911\ud569 \ubc18\uc751\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uadf8\uac83\uc740 \uc62c\ub808\ud540 \uc911\ud569\uacfc \uac19\uc740 \uacf5\uc815\uc5d0\uc11c \ucd09\ub9e4 \uc5ed\ud560\uc744 \ud558\uba70, \uc5ec\uae30\uc11c \ud3f4\ub9ac\uba38 \uc0ac\uc2ac\uc758 \ud615\uc131\uc744 \uc2dc\uc791\ud558\uc5ec \ub2e4\uc591\ud55c \uc720\ud615\uc758 \ud50c\ub77c\uc2a4\ud2f1 \ubc0f \uc5d8\ub77c\uc2a4\ud1a0\uba38 \uc0dd\uc0b0\uc73c\ub85c \uc774\uc5b4\uc9d1\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ubc30\uc704 \ubcf5\ud569\uccb4: TMA\ub294 \ub2e4\ub978 \ubd84\uc790 \ub610\ub294 \ud654\ud569\ubb3c\uacfc \ubc30\uc704 \ubcf5\ud569\uccb4\ub97c \ud615\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ucc29\ubb3c\uc740 \uc885\uc885 \uc11d\uc720\ud654\ud559 \uc815\uc81c, \uc720\uae30 \ud569\uc131 \ubc0f \uc81c\uc57d \uc81c\uc870\uc640 \uad00\ub828\ub41c \ubc18\uc751\uc744 \ud3ec\ud568\ud558\uc5ec \ub2e4\uc591\ud55c \ubc18\uc751\uc5d0\uc11c \ucd09\ub9e4 \ud65c\uc131\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc704\uce58\uc120\ud0dd\uc131 \ubc0f \uc785\uccb4\uc120\ud0dd\uc131: TMA \ucd09\ub9e4\ub294 \ubc18\uc751\uc758 \uc704\uce58\uc120\ud0dd\uc131(\ud2b9\uc815 \uc704\uce58\uc5d0\uc11c\uc758 \uc120\ud0dd\uc801 \ubc18\uc751) \ubc0f \uc785\uccb4\uc120\ud0dd\uc131(\ud2b9\uc815 \uc785\uccb4\uc774\uc131\uc9c8\uccb4\uc758 \uc120\ud0dd\uc801 \ud615\uc131)\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce60 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc120\ud0dd\uc131\uc5d0 \ub300\ud55c \uc774\ub7ec\ud55c \uc81c\uc5b4\ub294 \ud2b9\uc815 \uc791\uc6a9\uae30 \ub610\ub294 3\ucc28\uc6d0 \uad6c\uc870\ub97c \uac00\uc9c4 \ubcf5\uc7a1\ud55c \uc720\uae30 \ubd84\uc790\uc758 \ud569\uc131\uc5d0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc54c\ub8e8\ubbf8\ub284\uc758 \ucd09\ub9e4 \uc804\ub2ec: TMA\ub294 \ucd09\ub9e4 \ubc18\uc751\uc5d0\uc11c \uc54c\ub8e8\ubbf8\ub284\uc758 \uacf5\uae09\uc6d0 \uc5ed\ud560\uc744 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\uac83\uc740 \uc54c\ub8e8\ubbf8\ub284 \ubd80\ubd84\uc744 \ubc18\uc751\ubb3c\uc5d0 \uc804\ub2ec\ud558\uc5ec \uc0c8\ub85c\uc6b4 \ud654\ud559 \uacb0\ud569\uc758 \ud615\uc131\uc744 \uac00\ub2a5\ud558\uac8c \ud558\uace0 \uc6d0\ud558\ub294 \ubcc0\ud615\uc744 \ucd09\uc9c4\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n<p>TMA\uc758 \ucd09\ub9e4 \ud2b9\uc131\uc740 \uc11d\uc720\ud654\ud559, \ud50c\ub77c\uc2a4\ud2f1, \uc81c\uc57d \ubc0f \ud2b9\uc218 \ud654\ud559\uc744 \ud3ec\ud568\ud55c \ub2e4\uc591\ud55c \uc0b0\uc5c5\uc5d0\uc11c \ub2e4\uc6a9\ub3c4\ub85c \uc0ac\uc6a9\ub418\ub294 \ub3c4\uad6c\uc785\ub2c8\ub2e4. \ubc18\uc751\uc744 \ud65c\uc131\ud654\ud558\uace0, \uc120\ud0dd\uc131\uc744 \uc81c\uc5b4\ud558\uace0, \ubc30\uc704 \ubcf5\ud569\uccb4\uc5d0 \ucc38\uc5ec\ud558\ub294 \ub2a5\ub825\uc740 \uc2e4\ud5d8\uc2e4 \uaddc\ubaa8 \ubc0f \ub300\uaddc\ubaa8 \uc0b0\uc5c5 \uacf5\uc815 \ubaa8\ub450\uc5d0\uc11c \ucd09\ub9e4\ub85c \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \ub370 \uae30\uc5ec\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"%ED%99%94%ED%95%99_%EA%B8%B0%EC%83%81_%EC%A6%9D%EC%B0%A9CVD\"><\/span>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)<span class=\"ez-toc-section-end\"><\/span><\/h3>\n\n\n\n<p>TMA\ub294 \uace0\uccb4 \ud45c\uba74\uc5d0 \ub2e4\uc591\ud55c \ubb3c\uc9c8\uc758 \ubc15\ub9c9\uc744 \uc99d\ucc29\ud558\ub294 \ub370 \uc0ac\uc6a9\ub418\ub294 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29 \uacf5\uc815\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4. CVD\uc5d0\uc11c TMA\ub294 \ud0c1\uc6d4\ud55c \uc21c\ub3c4\uc640 \uade0\uc77c\uc131\uc73c\ub85c \uc54c\ub8e8\ubbf8\ub284 \ud568\uc720 \ud544\ub984\uc744 \uc99d\ucc29\ud558\uae30 \uc704\ud55c \uc804\uad6c\uccb4 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<br>TMA(Trimethyl Aluminium)\ub97c \uc0ac\uc6a9\ud55c \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)\uc5d0 \ub300\ud55c \uc815\ubcf4\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)\uc740 \uc7ac\ub8cc \uacfc\ud559 \ubc0f \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \uae30\uc220\uc785\ub2c8\ub2e4. TMA\ub294 \uace0\uccb4 \ud45c\uba74\uc5d0 \ubc15\ub9c9\uc744 \uc99d\ucc29\ud558\ub294 CVD \uacf5\uc815\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. TMA\uac00 CVD\uc5d0\uc11c \uc5b4\ub5bb\uac8c \ud65c\uc6a9\ub418\ub294\uc9c0 \uc0b4\ud3b4\ubcf4\uaca0\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul>\n<li>CVD \uacf5\uc815: CVD\ub294 \uc804\uad6c\uccb4 \ubd84\uc790\uac00 \ubc18\uc751 \ucc54\ubc84\uc5d0 \ub3c4\uc785\ub418\uc5b4 \ud654\ud559 \ubc18\uc751\uc744 \uac70\uccd0 \uae30\ud310 \ud45c\uba74\uc5d0 \ubc15\ub9c9\uc744 \ud615\uc131\ud558\ub294 \uacf5\uc815\uc785\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc804\uad6c\uccb4 \ubd84\uc790\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uc99d\ucc29 \uacf5\uc815 \ub3d9\uc548 \uc99d\uae30 \uc0c1\ud0dc\uc5d0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>TMA \uc804\uad6c\uccb4: CVD\uc5d0\uc11c TMA\ub294 \uc54c\ub8e8\ubbf8\ub284\uc744 \ud3ec\ud568\ud558\ub294 \ubc15\ub9c9\uc744 \uc99d\ucc29\ud558\uae30 \uc704\ud55c \uc804\uad6c\uccb4 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uae30\ud310\uc5d0 \uc6d0\ud558\ub294 \ud544\ub984\uc744 \ud615\uc131\ud558\uae30 \uc704\ud574 \ub2e4\ub978 \uc804\uad6c\uccb4\uc640 \ud568\uaed8 \ubc18\uc751 \ucc54\ubc84\ub85c \ub3c4\uc785\ub429\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ud544\ub984 \uc99d\ucc29: TMA\ub294 \uc801\uc808\ud55c \ubc18\uc751\ubb3c\uacfc \uc870\uac74\uc774 \uc874\uc7ac\ud560 \ub54c \ubd84\ud574\ub418\uc5b4 \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc790\ub97c \ubc29\ucd9c\ud569\ub2c8\ub2e4. \uc774 \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc790\ub294 \ub2e4\ub978 \uc804\uad6c\uccb4 \ubd84\uc790\uc640 \ubc18\uc751\ud558\uc5ec \uc6d0\ud558\ub294 \ud544\ub984\uc744 \ud615\uc131\ud569\ub2c8\ub2e4. \ud544\ub984 \uc131\uc7a5\uc740 \uae30\ud310 \ud45c\uba74\uc5d0\uc11c \uc77c\ub828\uc758 \ud654\ud559 \ubc18\uc751\uc744 \ud1b5\ud574 \ubc1c\uc0dd\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284 \ud544\ub984: TMA\ub294 \uc77c\ubc18\uc801\uc73c\ub85c CVD \uacf5\uc815\uc5d0\uc11c \uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284(Al2O3) \ud544\ub984\uc744 \uc99d\ucc29\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284 \ud544\ub984\uc740 \uc808\uc5f0 \ud2b9\uc131, \uc5f4 \uc548\uc815\uc131 \ubc0f \ud654\ud559 \ubc18\uc751\uc5d0 \ub300\ud55c \uc800\ud56d\uc131\uc774 \uc6b0\uc218\ud558\uc5ec \ud2b9\ud788 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc640 \uac19\uc740 \ub2e4\uc591\ud55c \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \uc720\uc6a9\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc21c\ub3c4 \ubc0f \uade0\uc77c\uc131: CVD \uacf5\uc815\uc5d0\uc11c TMA\uc758 \uc81c\uc5b4\ub41c \ubd84\ud574 \ubc0f \ubc18\uc751 \uc870\uac74\uc740 \uace0\uc21c\ub3c4 \ubc0f \uade0\uc77c\uc131\uc73c\ub85c \uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284 \ud544\ub984\uc758 \uc99d\ucc29\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uade0\uc77c\uc131\uc740 \uae30\ud310 \ud45c\uba74 \uc804\uccb4\uc5d0 \uac78\uccd0 \uc77c\uad00\ub41c \ud544\ub984 \ub450\uaed8\uc640 \ud2b9\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uae30\ud310 \ud638\ud658\uc131: TMA \uae30\ubc18 CVD \uacf5\uc815\uc740 \uc2e4\ub9ac\ucf58, \uc720\ub9ac, \uae08\uc18d \ubc0f \uae30\ud0c0 \ubc18\ub3c4\uccb4 \uc7ac\ub8cc\ub97c \ud3ec\ud568\ud55c \ub2e4\uc591\ud55c \uae30\ud310 \uc7ac\ub8cc\uc640 \ud638\ud658\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ub2e4\uc591\uc131\uc73c\ub85c \uc778\ud574 \uad11\ubc94\uc704\ud55c \uae30\ud310\uc5d0 \uc54c\ub8e8\ubbf8\ub284 \ud568\uc720 \ud544\ub984\uc744 \uc99d\ucc29\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n<p>CVD \uacf5\uc815\uc5d0\uc11c TMA\ub97c \ud65c\uc6a9\ud558\uba74 \uc6d0\ud558\ub294 \ud2b9\uc131\uc744 \uac00\uc9c4 \ubc15\ub9c9\uc744 \uace0\uccb4 \ud45c\uba74\uc5d0 \uc99d\ucc29\ud558\uae30 \uc704\ud55c \uc815\ubc00\ud558\uace0 \uc81c\uc5b4\ub41c \ubc29\ubc95\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uace0\uc21c\ub3c4 \ubc0f \uade0\uc77c\uc131\uc73c\ub85c \uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284 \ud544\ub984\uc744 \uc99d\ucc29\ud560 \uc218 \uc788\ub294 \ub2a5\ub825\uc740 TMA\ub97c \ubc18\ub3c4\uccb4 \uc0b0\uc5c5 \ubc0f \ubc15\ub9c9 \ucf54\ud305\uc774 \ud544\uc694\ud55c \uae30\ud0c0 \ubd84\uc57c\uc5d0\uc11c \ud544\uc218\uc801\uc778 \uc804\uad6c\uccb4\ub85c \ub9cc\ub4ed\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"%EB%B0%98%EB%8F%84%EC%B2%B4_%EC%A0%9C%EC%A1%B0\"><\/span>\ubc18\ub3c4\uccb4 \uc81c\uc870<span class=\"ez-toc-section-end\"><\/span><\/h3>\n\n\n\n<p>\ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c TMA\ub294 \uc804\uc790 \uc7a5\uce58 \uc0dd\uc0b0\uc5d0 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uc774\ub294 \uc808\uc5f0\uce35 \uc5ed\ud560\uc744 \ud558\uace0 \uc9d1\uc801 \ud68c\ub85c\uc758 \uc131\ub2a5\uacfc \uc2e0\ub8b0\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294 \uc54c\ub8e8\ubbf8\ub284 \uc0b0\ud654\ub9c9 \uc99d\ucc29\uc744 \uc704\ud55c \ud575\uc2ec \uc804\uad6c\uccb4 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c TMA(\ud2b8\ub9ac\uba54\ud2f8 \uc54c\ub8e8\ubbf8\ub284)\uc758 \uc5ed\ud560\uc5d0 \ub300\ud55c \uc815\ubcf4\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\ubc18\ub3c4\uccb4 \uc81c\uc870\ub294 \uc9d1\uc801\ud68c\ub85c(IC) \ubc0f \ub9c8\uc774\ud06c\ub85c\uce69\uacfc \uac19\uc740 \uc804\uc790 \uc7a5\uce58\uc758 \uc0dd\uc0b0\uacfc \uad00\ub828\ub41c \ubcf5\uc7a1\ud558\uace0 \uc815\ubc00\ud55c \ud504\ub85c\uc138\uc2a4\uc785\ub2c8\ub2e4. TMA\ub294 \uace0\uc720\ud55c \ud2b9\uc131\uacfc \ubc18\uc751\uc131\uc73c\ub85c \uc778\ud574 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uc774 \uc0b0\uc5c5\uc5d0\uc11c TMA\uac00 \uc5b4\ub5bb\uac8c \uc0ac\uc6a9\ub418\ub294\uc9c0 \uc0b4\ud3b4\ubcf4\uaca0\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul>\n<li>\uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284(Al2O3) \ud544\ub984: TMA\ub294 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284 \ud544\ub984\uc744 \uc99d\ucc29\ud558\uae30 \uc704\ud55c \uc804\uad6c\uccb4\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774 \ud544\ub984\uc740 \uc808\uc5f0\uce35 \uc5ed\ud560\uc744 \ud558\uc5ec \uae30\ubcf8 \ubd80\ud488\uc744 \ubcf4\ud638\ud558\uace0 \uc9d1\uc801 \ud68c\ub85c\uc758 \uc131\ub2a5\uacfc \uc2e0\ub8b0\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD): TMA\ub294 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c \uc77c\ubc18\uc801\uc73c\ub85c \uc0ac\uc6a9\ub418\ub294 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29 \uacf5\uc815\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. CVD\uc5d0\uc11c TMA\ub294 \ubc18\uc751 \ucc54\ubc84\ub85c \ub3c4\uc785\ub418\uc5b4 \uc81c\uc5b4\ub41c \ubd84\ud574\ub97c \uac70\uccd0 \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc790\ub97c \ud615\uc131\ud569\ub2c8\ub2e4. \uadf8\ub7f0 \ub2e4\uc74c \uc774\ub7ec\ud55c \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc790\ub294 \ub2e4\ub978 \uc804\uad6c\uccb4\uc640 \ubc18\uc751\ud558\uc5ec \uae30\ud310 \ud45c\uba74\uc5d0 \uc54c\ub8e8\ubbf8\ub284 \uc0b0\ud654\ubb3c \ud544\ub984\uc744 \uc99d\ucc29\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc808\uc5f0\uce35: TMA \uae30\ubc18 CVD \uacf5\uc815\uc744 \ud1b5\ud574 \uc6b0\uc218\ud55c \uc808\uc5f0 \ud2b9\uc131\uc744 \uc9c0\ub2cc \uc587\uace0 \uade0\uc77c\ud55c \uace0\ud488\uc9c8 \uc54c\ub8e8\ubbf8\ub284 \uc0b0\ud654\ub9c9\uc744 \uc99d\ucc29\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ud544\ub984\uc740 \uc9d1\uc801 \ud68c\ub85c\uc758 \uc11c\ub85c \ub2e4\ub978 \uad6c\uc131 \uc694\uc18c \uc0ac\uc774\uc5d0 \uc804\uae30 \uc808\uc5f0\uc744 \uc81c\uacf5\ud558\ub294 \uc720\uc804\uccb4 \uce35 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc720\uc804\uc728: TMA\uc5d0\uc11c \uc720\ub798\ud55c \uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284 \ud544\ub984\uc740 \uc720\uc804\uc728\uc774 \ub192\uc544 \ub2e8\uc704 \uba74\uc801\ub2f9 \uc815\uc804\uc6a9\ub7c9\uc774 \ud070 \ucee4\ud328\uc2dc\ud130\uac00 \ud544\uc694\ud55c \uc6a9\ub3c4\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4. \ucee4\ud328\uc2dc\ud130\ub294 \uc804\uae30 \uc5d0\ub108\uc9c0\ub97c \uc800\uc7a5\ud558\uace0 \ubc29\ucd9c\ud558\ub294 \uc804\uc790 \uc7a5\uce58\uc758 \uc911\uc694\ud55c \uad6c\uc131 \uc694\uc18c\uc785\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uac8c\uc774\ud2b8 \uc720\uc804\uccb4: TMA \uae30\ubc18 CVD \uacf5\uc815\uc744 \ud1b5\ud574 MOS(\uae08\uc18d-\uc0b0\ud654\ubb3c-\ubc18\ub3c4\uccb4) \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 \uac8c\uc774\ud2b8 \uc720\uc804\uccb4\ub85c \uc54c\ub8e8\ubbf8\ub284 \uc0b0\ud654\ub9c9\uc744 \uc99d\ucc29\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uac8c\uc774\ud2b8 \uc720\uc804\uccb4\ub294 \ud2b8\ub79c\uc9c0\uc2a4\ud130\uc758 \uc804\ub958 \ud750\ub984\uc744 \uc81c\uc5b4\ud558\uc5ec \uc804\uae30 \uc2e0\ud638\uc758 \uc815\ud655\ud55c \uc804\ud658 \ubc0f \ubcc0\uc870\ub97c \ud5c8\uc6a9\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc5f4 \uc548\uc815\uc131: TMA\uc5d0\uc11c \ud30c\uc0dd\ub41c \uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284 \ud544\ub984\uc740 \uc6b0\uc218\ud55c \uc5f4 \uc548\uc815\uc131\uc744 \ub098\ud0c0\ub0b4\uba70 \uc5b4\ub2d0\ub9c1 \ubc0f \uae08\uc18d\ud654\uc640 \uac19\uc740 \ud6c4\uc18d \uc81c\uc870 \ub2e8\uacc4\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uace0\uc628\uc744 \uacac\ub525\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n<p>\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0 TMA\ub97c \uc0ac\uc6a9\ud558\uba74 \uace0\uae09 \uc804\uc790 \uc7a5\uce58 \uc81c\uc870\uc5d0 \uc911\uc694\ud55c \uace0\ud488\uc9c8 \uc0b0\ud654\uc54c\ub8e8\ubbf8\ub284 \ud544\ub984\uc744 \uc99d\ucc29\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ud544\ub984\uc740 \uc9d1\uc801 \ud68c\ub85c\uc758 \uc131\ub2a5, \uc2e0\ub8b0\uc131 \ubc0f \uc18c\ud615\ud654\uc5d0 \uae30\uc5ec\ud558\uc5ec \ud604\ub300 \uae30\uc220\uc744 \uc9c0\uc6d0\ud558\ub294 \ub354 \uc791\uace0 \ube60\ub974\uace0 \ud6a8\uc728\uc801\uc778 \uc804\uc790 \uc7a5\uce58\ub97c \uc0dd\uc0b0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"%EC%A0%9C%EC%95%BD_%EC%82%B0%EC%97%85\"><\/span>\uc81c\uc57d \uc0b0\uc5c5<span class=\"ez-toc-section-end\"><\/span><\/h3>\n\n\n\n<p>TMA\ub294 \ud65c\uc131 \uc81c\uc57d \uc131\ubd84(API)\uc758 \ud569\uc131\uc744 \uc704\ud574 \uc81c\uc57d \ubd80\ubb38\uc5d0\uc11c \uc751\uc6a9 \ud504\ub85c\uadf8\ub7a8\uc744 \ucc3e\uc2b5\ub2c8\ub2e4. \uadf8\uac83\uc740 \ubcf5\uc7a1\ud55c \ubd84\uc790 \uad6c\uc870\uc758 \uc0dd\uc131\uc744 \ucd09\uc9c4\ud558\uace0 \uc81c\uc57d \uc911\uac04\uccb4 \uc0dd\uc0b0\uc758 \ube4c\ub529 \ube14\ub85d \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.\uc81c\uc57d \uc0b0\uc5c5\uc5d0\uc11c TMA(\ud2b8\ub9ac\uba54\ud2f8 \uc54c\ub8e8\ubbf8\ub284)\uc758 \uc5ed\ud560\uc5d0 \ub300\ud55c \uc815\ubcf4\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc81c\uc57d \uc0b0\uc5c5\uc740 \uc57d\ubb3c \ubc0f \uce58\ub8cc \ud654\ud569\ubb3c\uc758 \uac1c\ubc1c \ubc0f \uc0dd\uc0b0\uc5d0 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. TMA(Trimethyl Aluminium)\ub294 \uace0\uc720\ud55c \ud2b9\uc131\uacfc \ubc18\uc751\uc131\uc73c\ub85c \uc778\ud574 \uc81c\uc57d \ubd80\ubb38\uc5d0\uc11c \uc751\uc6a9 \ubd84\uc57c\ub97c \ucc3e\uc2b5\ub2c8\ub2e4. \uc81c\uc57d \uc0b0\uc5c5\uc5d0\uc11c TMA\uac00 \uc5b4\ub5bb\uac8c \uc0ac\uc6a9\ub418\ub294\uc9c0 \uc0b4\ud3b4\ubcf4\uaca0\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul>\n<li>\ud65c\uc131 \uc81c\uc57d \uc131\ubd84(API)\uc758 \ud569\uc131: TMA\ub294 \ud65c\uc131 \uc81c\uc57d \uc131\ubd84(API) \ud569\uc131\uc5d0\uc11c \uc911\uc694\ud55c \uc2dc\uc57d \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uadf8\uac83\uc740 \ubcf5\uc7a1\ud55c \ubd84\uc790 \uad6c\uc870\uc758 \uc0dd\uc131\uc744 \ucd09\uc9c4\ud558\uace0 \uc81c\uc57d \uc911\uac04\uccb4 \uc0dd\uc0b0\uc758 \ube4c\ub529 \ube14\ub85d \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>Aluminum Incorporation: \ubd84\uc790 \uad6c\uc870\uc5d0 \uc54c\ub8e8\ubbf8\ub284\uc744 \ub3c4\uc785\ud558\ub294 TMA\uc758 \ub2a5\ub825\uc740 \uc81c\uc57d \ud569\uc131\uc5d0 \uc720\ub9ac\ud569\ub2c8\ub2e4. \uc54c\ub8e8\ubbf8\ub284\uc758 \ud63c\uc785\uc740 \ud654\ud569\ubb3c\uc758 \ud2b9\uc131\uc744 \ubcc0\uacbd\ud558\uc5ec \ud5a5\uc0c1\ub41c \uc0dd\uccb4 \ud65c\uc131, \ud5a5\uc0c1\ub41c \uc548\uc815\uc131 \ub610\ub294 \uae30\ud0c0 \uc6d0\ud558\ub294 \ud2b9\uc131\uc73c\ub85c \uc774\uc5b4\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc81c\uc57d \ubc18\uc751\uc758 \ucd09\ub9e4 \uc791\uc6a9: TMA\ub294 \ub2e4\uc591\ud55c \uc81c\uc57d \ubc18\uc751\uc5d0\uc11c \ucd09\ub9e4 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uadf8\uac83\uc758 \ucd09\ub9e4 \ud2b9\uc131\uc740 \ud2b9\uc815 \ud654\ud559\uc801 \ubcc0\ud615\uc758 \uac00\uc18d\ud654\ub97c \uac00\ub2a5\ud558\uac8c \ud558\uc5ec \uc81c\uc57d \ud569\uc131\uc5d0\uc11c \ud544\uc218\uc801\uc778 \ub3c4\uad6c\uac00 \ub429\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ubcf5\ud569 \uc720\uae30 \ud569\uc131: TMA\ub294 \uc758\uc57d\ud488\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ubcf5\ud569 \uc720\uae30 \ubd84\uc790\uc758 \ud569\uc131\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uadf8\uac83\uc758 \ubc18\uc751\uc131\uacfc \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc790\ub97c \ubd84\uc790 \uad6c\uc870\uc5d0 \ub3c4\uc785\ud558\ub294 \ub2a5\ub825\uc740 \ub2e4\uc591\ud558\uace0 \ubcf5\uc7a1\ud55c \ud654\ud569\ubb3c\uc758 \uc0dd\uc131\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc57d\ubb3c \uc18d\uc131\uc758 \ub9de\ucda4\ud654: TMA\ub294 \uc57d\ud559 \ud569\uc131\uc5d0 \ucc38\uc5ec\ud558\uc5ec \uc57d \uc18d\uc131\uc744 \ub9de\ucda4\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc54c\ub8e8\ubbf8\ub284\uc744 \ud1b5\ud569\ud558\uac70\ub098 TMA \ucd09\ub9e4 \ubc18\uc751\uc744 \ud65c\uc6a9\ud568\uc73c\ub85c\uc368 \uc81c\uc57d \ud654\ud559\uc790\ub294 \ud2b9\uc815 \uce58\ub8cc \ud6a8\uacfc\ub97c \ub2ec\uc131\ud558\uae30 \uc704\ud574 \uc57d\ubb3c\uc758 \ubb3c\ub9ac\uc801, \ud654\ud559\uc801 \ub610\ub294 \uc0dd\ubb3c\ud559\uc801 \ud2b9\uc131\uc744 \uc218\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n<p>\uc81c\uc57d \uc0b0\uc5c5\uc5d0\uc11c TMA\ub97c \uc0ac\uc6a9\ud558\uba74 \uc0c8\ub85c\uc6b4 \uc57d\ubb3c \ud654\ud569\ubb3c \ubc0f API\uc758 \uac1c\ubc1c \ubc0f \uc0dd\uc0b0\uc5d0 \uae30\uc5ec\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. TMA\uc758 \ucd09\ub9e4 \ud2b9\uc131, \uc54c\ub8e8\ubbf8\ub284 \ud1b5\ud569 \uae30\ub2a5 \ubc0f \ubcf5\uc7a1\ud55c \uc720\uae30 \ud569\uc131\uc758 \ub2e4\uc6a9\uc131\uc73c\ub85c \uc778\ud574 TMA\ub294 \uc81c\uc57d \ud654\ud559\uc790 \ubc0f \uc5f0\uad6c\uc6d0\uc5d0\uac8c \uc720\uc6a9\ud55c \ub3c4\uad6c\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\"><span class=\"ez-toc-section\" id=\"%EC%9C%A0%EA%B8%B0_%ED%95%A9%EC%84%B1\"><\/span>\uc720\uae30 \ud569\uc131<span class=\"ez-toc-section-end\"><\/span><\/h3>\n\n\n\n<p>TMA\ub294 \uc720\uae30 \ud569\uc131\uc5d0 \ub110\ub9ac \ud65c\uc6a9\ub418\uc5b4 \ub2e4\uc591\ud55c \uc720\uae30 \ud654\ud569\ubb3c\uc744 \uc0dd\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ubc18\uc751\uc131\uacfc \uc54c\ub8e8\ubbf8\ub284\uc744 \ubd84\uc790 \uad6c\uc870\uc5d0 \ub3c4\uc785\ud558\ub294 \ub2a5\ub825\uc73c\ub85c \uc778\ud574 \uc81c\uc57d, \ub18d\uc57d \ubc0f \ud2b9\uc218 \ud654\ud559 \ubb3c\uc9c8\uc758 \ud569\uc131\uc5d0 \uc5c6\uc5b4\uc11c\ub294 \uc548 \ub420 \ub3c4\uad6c\uc785\ub2c8\ub2e4. TMA(\ud2b8\ub9ac\uba54\ud2f8 \uc54c\ub8e8\ubbf8\ub284)\uc758 \uc5ed\ud560\uc5d0 \ub300\ud55c \uc815\ubcf4\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p>\uc720\uae30 \ud569\uc131\uc740 \ud654\ud559 \ubc18\uc751\uc744 \ud1b5\ud55c \ubcf5\uc7a1\ud55c \uc720\uae30 \ubd84\uc790\uc758 \uc0dd\uc131\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4. TMA(Trimethyl Aluminium)\ub294 \uace0\uc720\ud55c \ud2b9\uc131\uacfc \ubc18\uc751\uc131\uc73c\ub85c \uc778\ud574 \uc720\uae30 \ud569\uc131\uc5d0\uc11c \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uc774 \ubd84\uc57c\uc5d0\uc11c TMA\uac00 \uc5b4\ub5bb\uac8c \uc0ac\uc6a9\ub418\ub294\uc9c0 \uc0b4\ud3b4\ubcf4\uaca0\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul>\n<li>\uc54c\ub8e8\ubbf8\ub284 \ub3c4\uc785: TMA\ub294 \ud569\uc131 \uc911\uc5d0 \uc720\uae30 \ud654\ud569\ubb3c\uc5d0 \uc54c\ub8e8\ubbf8\ub284\uc744 \ub3c4\uc785\ud558\ub294 \ub370 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc54c\ub8e8\ubbf8\ub284 \uc6d0\uc790\uc758 \ub3c4\uc785\uc740 \ubd84\uc790\uc758 \ud2b9\uc131\uc744 \ubcc0\uacbd\ud558\uc5ec \ubc18\uc751\uc131 \ub610\ub294 \ud2b9\uc815 \uae30\ub2a5\uc744 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc54c\ud0ac\ud654 \ubc18\uc751: TMA\ub294 \uc720\uae30 \ud569\uc131\uc5d0\uc11c \uc911\uc694\ud55c \uc54c\ud0ac\ud654\uc81c\ub85c \uc791\uc6a9\ud569\ub2c8\ub2e4. \uba54\ud2f8\uae30(-CH3)\ub97c \ub2e4\ub978 \uc720\uae30 \ud654\ud569\ubb3c\ub85c \uc62e\uaca8\uc11c \uc0c8\ub85c\uc6b4 \ud0c4\uc18c-\ud0c4\uc18c \uacb0\ud569 \ud615\uc131\uc744 \ucd09\uc9c4\ud569\ub2c8\ub2e4. TMA\ub97c \uc0ac\uc6a9\ud55c \uc54c\ud0ac\ud654 \ubc18\uc751\uc740 \ud2b9\uc131\uc774 \ubcc0\uacbd\ub41c \ub2e4\uc591\ud55c \uc720\uae30 \ubd84\uc790\uc758 \uc0dd\uc131\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc720\uae30 \ubc18\uc751\uc758 \ucd09\ub9e4 \uc791\uc6a9: TMA\ub294 \ub2e4\uc591\ud55c \uc720\uae30 \ubc18\uc751\uc5d0\uc11c \ucd09\ub9e4 \ud65c\uc131\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \ud2b9\uc815 \ud654\ud559\uc801 \ubcc0\ud615\uc744 \ud65c\uc131\ud654\ud558\uace0 \ucd09\uc9c4\ud558\ub294 \ub2a5\ub825\uc740 \uc6d0\ud558\ub294 \ubc18\uc751\uc744 \uac00\uc18d\ud654\ud558\uc5ec \uc720\uae30 \ud569\uc131\uc5d0\uc11c \ud544\uc218 \ucd09\ub9e4\uac00 \ub429\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uae30\ub2a5 \uadf8\ub8f9 \ubcc0\ud658: TMA\ub294 \uae30\ub2a5 \uadf8\ub8f9 \ubcc0\ud658\uc5d0 \uad00\uc5ec\ud558\uc5ec \ud558\ub098\uc758 \uae30\ub2a5 \uadf8\ub8f9\uc744 \ub2e4\ub978 \uae30\ub2a5 \uadf8\ub8f9\uc73c\ub85c \ubcc0\ud658\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ud2b9\uc131\uc740 \ub2e4\uc591\ud55c \ud654\ud559\uc801 \ud2b9\uc131\uacfc \uae30\ub2a5\uc744 \uac00\uc9c4 \uad11\ubc94\uc704\ud55c \uc720\uae30 \ud654\ud569\ubb3c\uc758 \ud569\uc131\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ud0c4\uc18c-\ud0c4\uc18c \uacb0\ud569 \ud615\uc131: TMA\ub294 Barbier \ubc18\uc751 \ubc0f Reformatsky \ubc18\uc751\uacfc \uac19\uc740 \ud0c4\uc18c-\ud0c4\uc18c \uacb0\ud569 \ud615\uc131 \ubc18\uc751\uc5d0 \ucc38\uc5ec\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubc18\uc751\uc5d0\ub294 \uce74\ub974\ubcf4\ub2d0 \ud654\ud569\ubb3c\uc5d0 TMA\ub97c \ucca8\uac00\ud558\uc5ec \uc0c8\ub85c\uc6b4 \ud0c4\uc18c-\ud0c4\uc18c \uacb0\ud569\uc744 \ud615\uc131\ud558\uace0 \ubcf5\uc7a1\ud55c \uc720\uae30 \ubd84\uc790\ub97c \uc0dd\uc131\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ub2e4\uc591\ud55c \uc751\uc6a9 \ubd84\uc57c: TMA\ub294 \uc81c\uc57d, \ub18d\uc57d \ubc0f \ud2b9\uc218 \ud654\ud559 \ubb3c\uc9c8\uc744 \ud3ec\ud568\ud55c \uc720\uae30 \ud569\uc131\uc758 \ub2e4\uc591\ud55c \ubd84\uc57c\uc5d0\uc11c \uc751\uc6a9 \ubd84\uc57c\ub97c \ucc3e\uc2b5\ub2c8\ub2e4. \ubc18\uc751\uc131\uacfc \ub2e4\uc7ac\ub2e4\ub2a5\ud568\uc73c\ub85c \uc778\ud574 \uc774\ub7ec\ud55c \uc0b0\uc5c5\uc5d0\uc11c \ubcf5\uc7a1\ud55c \uc720\uae30 \ud654\ud569\ubb3c\uc744 \ud569\uc131\ud558\ub294 \ub370 \uc720\uc6a9\ud55c \ub3c4\uad6c\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n<p>\uc720\uae30 \ud569\uc131\uc5d0\uc11c TMA\ub97c \ud65c\uc6a9\ud558\uba74 \ub9de\ucda4\ud615 \ud2b9\uc131\uc744 \uc9c0\ub2cc \ub2e4\uc591\ud558\uace0 \ubcf5\uc7a1\ud55c \uc720\uae30 \ubd84\uc790\ub97c \uc0dd\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc54c\ub8e8\ubbf8\ub284\uc744 \ub3c4\uc785\ud558\uace0, \uc54c\ud0ac\ud654\ub97c \ucd09\uc9c4\ud558\uace0, \ubc18\uc751\uc744 \ucd09\uc9c4\ud558\uace0, \ud0c4\uc18c-\ud0c4\uc18c \uacb0\ud569 \ud615\uc131\uc5d0 \ucc38\uc5ec\ud558\ub294 \uc5ed\ud560\uc740 \uc720\uae30 \ud654\ud559\uc758 \ubc1c\uc804\uacfc \ub2e4\uc591\ud55c \uc751\uc6a9\uc744 \uc704\ud55c \uc0c8\ub85c\uc6b4 \ud654\ud569\ubb3c \uac1c\ubc1c\uc5d0 \uae30\uc5ec\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading has-vivid-cyan-blue-color has-text-color\"><span class=\"ez-toc-section\" id=\"TMA%EC%9D%98_%EC%95%88%EC%A0%84_%EA%B3%A0%EB%A0%A4_%EC%82%AC%ED%95%AD\"><\/span>TMA\uc758 \uc548\uc804 \uace0\ub824 \uc0ac\ud56d<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>\uc790\uc5f0 \ubc1c\ud654\uc131\uacfc \ubc18\uc751\uc131\uc73c\ub85c \uc778\ud574 TMA\ub294 \ucd5c\ub300\ud55c \uc8fc\uc758\ud574\uc11c \ub2e4\ub8e8\uc5b4\uc57c \ud569\ub2c8\ub2e4. \uacf5\uae30\ub098 \uc2b5\uae30\uc5d0 \ub178\ucd9c\ub418\uba74 \uc2ec\uac01\ud55c \uc704\ud5d8\uc744 \ucd08\ub798\ud569\ub2c8\ub2e4. \uc0ac\uace0\ub97c \uc608\ubc29\ud558\uace0 \uc791\uc5c5\uc790\uc640 \ud658\uacbd\uc758 \uc548\uc804\uc744 \ubcf4\uc7a5\ud558\uae30 \uc704\ud574 \ucde8\uae09 \ubc0f \ubcf4\uad00 \uc911\uc5d0 \uc5d0\uc5b4 \ud504\ub9ac \uae30\uc220\uacfc \uac19\uc740 \uc5c4\uaca9\ud55c \uc548\uc804 \ud504\ub85c\ud1a0\ucf5c \ubc0f \uc7a5\ube44\ub97c \uc0ac\uc6a9\ud574\uc57c \ud569\ub2c8\ub2e4.TMA(Trimethyl Aluminium)\uc758 \uc548\uc804 \uace0\ub824 \uc0ac\ud56d\uc5d0 \ub300\ud55c \uc815\ubcf4\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<ul>\n<li>\ubc1c\ud654\uc131 \ud2b9\uc131: TMA\ub294 \ubc1c\ud654\uc131\uc774 \ub9e4\uc6b0 \ub192\uc544 \uacf5\uae30\ub098 \uc2b5\uae30\uc5d0 \ub178\ucd9c\ub418\uba74 \uc790\uc5f0 \ubc1c\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. TMA\ub97c \ub9e4\uc6b0 \uc8fc\uc758\ud574\uc11c \ucde8\uae09\ud558\uace0 \uc6b0\ubc1c\uc801\uc778 \ubc1c\ud654 \ub610\ub294 \ud654\uc7ac\ub97c \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uc5c4\uaca9\ud55c \uc548\uc804 \ud504\ub85c\ud1a0\ucf5c\uc744 \uc0ac\uc6a9\ud558\ub294 \uac83\uc774 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n\n\n\n<li>Air-Sensitive: TMA\ub294 \uacf5\uae30, \ud2b9\ud788 \uc2b5\uae30\uc640 \uc0b0\uc18c\uc5d0 \ub9e4\uc6b0 \ubc18\uc751\ud569\ub2c8\ub2e4. \ubc18\uc751\uc758 \uc704\ud5d8\uc744 \ucd5c\uc18c\ud654\ud558\uace0 \uc548\uc815\uc131\uc744 \ubcf4\uc7a5\ud558\uae30 \uc704\ud574 \ubd88\ud65c\uc131 \uac00\uc2a4 \ubd84\uc704\uae30(\uc608: \uc9c8\uc18c \ub610\ub294 \uc544\ub974\uace4)\uc640 \uac19\uc774 \uacf5\uae30\uac00 \uc5c6\ub294 \ud658\uacbd\uc5d0\uc11c \ucde8\uae09\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc801\uc808\ud55c \ud658\uae30: TMA\ub85c \uc791\uc5c5\ud560 \ub54c \uc2e4\ud5d8\uc2e4\uc774\ub098 \uc791\uc5c5 \uacf5\uac04\uc5d0\uc11c \uc801\uc808\ud55c \ud658\uae30\ub97c \ubcf4\uc7a5\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \uc801\uc808\ud55c \ud658\uae30\ub294 \uc7a0\uc7ac\uc801\uc73c\ub85c \uc704\ud5d8\ud55c \uc99d\uae30\ub97c \uc81c\uac70\ud558\uace0 \uc548\uc804\ud55c \uc791\uc5c5 \ud658\uacbd\uc744 \uc720\uc9c0\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uac1c\uc778\ubcf4\ud638\uad6c(PPE): TMA \ucde8\uae09 \uc2dc \ub0b4\ud654\ud559\uc131 \uc7a5\uac11, \ubcf4\uc548\uacbd \ub610\ub294 \uace0\uae00, \uc2e4\ud5d8\ubcf5 \ub610\ub294 \ubcf4\ud638\ubcf5, \uc55e\uc774 \ub9c9\ud78c \uc2e0\ubc1c \ub4f1 \uc801\uc808\ud55c \uac1c\uc778\ubcf4\ud638\uad6c\ub97c \ucc29\uc6a9\ud574\uc57c \ud569\ub2c8\ub2e4. . PPE\ub294 \uc7a0\uc7ac\uc801\uc778 \ud53c\ubd80 \uc811\ucd09, \ud761\uc785 \ub610\ub294 \ub208 \ub178\ucd9c\ub85c\ubd80\ud130 \ubcf4\ud638\ud558\ub294 \uc7a5\ubcbd \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uad50\uc721 \ubc0f \uc9c0\uc2dd: TMA\ub97c \ub2e4\ub8e8\ub294 \uac1c\uc778\uc740 \uc548\uc804\ud55c \ucde8\uae09, \ubcf4\uad00 \ubc0f \ud3d0\uae30\uc5d0 \ub300\ud55c \ucca0\uc800\ud55c \uad50\uc721\uc744 \ubc1b\uc544\uc57c \ud569\ub2c8\ub2e4. \uc704\ud5d8\uc744 \ucd5c\uc18c\ud654\ud558\uace0 \uc548\uc804\ud55c \uad00\ud589\uc744 \ubcf4\uc7a5\ud558\uae30 \uc704\ud574 TMA\uc758 \uc18d\uc131, \uc704\ud5d8 \ubc0f \uc548\uc804 \uc870\uce58\ub97c \uc798 \uc774\ud574\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ucde8\uae09 \ubc0f \ubcf4\uad00: TMA\ub294 \uc798 \ud1b5\uc81c\ub41c \ubc29\uc2dd\uc73c\ub85c \ucde8\uae09 \ubc0f \ubcf4\uad00\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4. \ubc18\uc751 \ubc0f \uc7a0\uc7ac\uc801 \uc704\ud5d8\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uacf5\uae30\uac00 \uc5c6\ub294 \uc6a9\uae30\uc5d0 \ubcf4\uad00\ud558\uace0 \uc2b5\uae30, \uc0b0\uc18c \ubc0f \ube44\ud638\ud658\uc131 \ubb3c\uc9c8\ub85c\ubd80\ud130 \uba40\ub9ac \ubcf4\uad00\ud574\uc57c \ud569\ub2c8\ub2e4. TMA \uc6a9\uae30\uc758 \uc801\uc808\ud55c \ub77c\ubca8\ub9c1 \ubc0f \ubb38\uc11c\ud654\ub294 \uc548\uc804\ud55c \ubcf4\uad00 \ubc0f \uc2dd\ubcc4\uc5d0\ub3c4 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ube44\uc0c1 \ub300\ube44: TMA\uc640 \uad00\ub828\ub41c \uc720\ucd9c, \ub204\ucd9c \ub610\ub294 \uc0ac\uace0\uac00 \ubc1c\uc0dd\ud560 \uacbd\uc6b0 \ube44\uc0c1 \uc808\ucc28 \ubc0f \ud504\ub85c\ud1a0\ucf5c\uc744 \ub9c8\ub828\ud574\uc57c \ud569\ub2c8\ub2e4. \uc608\uc0c1\uce58 \ubabb\ud55c \uc0c1\ud669\uc744 \ud6a8\uacfc\uc801\uc73c\ub85c \ucc98\ub9ac\ud558\ub824\uba74 \uc801\uc808\ud55c \uad50\uc721, \uc548\uc804 \uc7a5\ube44\uc758 \uac00\uc6a9\uc131 \ubc0f \uc801\uc808\ud55c \ub300\uc751 \uc870\uce58\uc5d0 \ub300\ud55c \uc9c0\uc2dd\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ud3d0\uae30\ubb3c \ucc98\ub9ac: TMA \ubc0f \ucc98\ub9ac \uc911\uc5d0 \ubc1c\uc0dd\ud558\ub294 \ubaa8\ub4e0 \ud3d0\uae30\ubb3c\uc744 \uc801\uc808\ud558\uac8c \ucc98\ub9ac\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \uc778\uccb4 \uac74\uac15\uc774\ub098 \ud658\uacbd\uc5d0 \uc704\ud5d8\uc744 \ucd08\ub798\ud558\uc9c0 \uc54a\ub3c4\ub85d TMA\uc758 \uc548\uc804\ud55c \ud3d0\uae30\ub97c \uc704\ud574 \ud604\uc9c0 \uaddc\uc815 \ubc0f \uc9c0\uce68\uc744 \ub530\ub974\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n<p>TMA\ub85c \uc791\uc5c5\ud560 \ub54c \uc774\ub7ec\ud55c \uc548\uc804 \uace0\ub824 \uc0ac\ud56d \ubc0f \uc9c0\uce68\uc744 \uc900\uc218\ud558\ub294 \uac83\uc740 \uc0ac\uace0\ub97c \uc608\ubc29\ud558\uace0 \uc704\ud5d8\uc744 \ucd5c\uc18c\ud654\ud558\uba70 \uad00\ub828\ub41c \ubaa8\ub4e0 \uc9c1\uc6d0\uc744 \uc704\ud55c \uc548\uc804\ud55c \uc791\uc5c5 \ud658\uacbd\uc744 \uc720\uc9c0\ud558\ub294 \ub370 \uac00\uc7a5 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading has-vivid-cyan-blue-color has-text-color\"><span class=\"ez-toc-section\" id=\"TMA_%EC%B7%A8%EA%B8%89_%EB%B0%8F_%EB%B3%B4%EA%B4%80\"><\/span>TMA \ucde8\uae09 \ubc0f \ubcf4\uad00<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>TMA\uc758 \uc801\uc808\ud55c \ucde8\uae09 \ubc0f \ubcf4\uad00\uc740 \uc704\ud5d8\uc744 \ucd5c\uc18c\ud654\ud558\uace0 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud558\ub294 \ub370 \uc911\uc694\ud569\ub2c8\ub2e4. TMA\ub294 \uacf5\uae30\uac00 \uc5c6\ub294 \uc6a9\uae30\uc5d0 \ubcf4\uad00\ud574\uc57c \ud558\uba70, \uac00\uae09\uc801\uc774\uba74 \uc9c8\uc18c\ub098 \uc544\ub974\uace4\uacfc \uac19\uc740 \ubd88\ud65c\uc131 \uae30\uccb4 \ubd84\uc704\uae30\uc5d0\uc11c \ubcf4\uad00\ud574\uc57c \ud569\ub2c8\ub2e4. \uc6d0\uce58 \uc54a\ub294 \ubc18\uc751\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 TMA\ub97c \uc2b5\uae30, \uc0b0\uc18c \ubc0f \ube44\ud638\ud658\uc131 \ubb3c\uc9c8\ub85c\ubd80\ud130 \uba40\ub9ac \ub450\ub294 \uac83\uc774 \uc88b\uc2b5\ub2c8\ub2e4. TMA(\ud2b8\ub9ac\uba54\ud2f8 \uc54c\ub8e8\ubbf8\ub284)\uc758 \ucde8\uae09 \ubc0f \ubcf4\uad00\uc5d0 \ub300\ud55c \uc815\ubcf4\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p>TMA\uc758 \ucde8\uae09 \ubc0f \ubcf4\uad00\uc740 \uc548\uc804\uc744 \ubcf4\uc7a5\ud558\uace0 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud558\uae30 \uc704\ud574 \uc2e0\uc911\ud55c \uace0\ub824\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \ub2e4\uc74c\uc740 \uc801\uc808\ud55c TMA \ucde8\uae09 \ubc0f \ubcf4\uad00\uc5d0 \ub300\ud55c \uc9c0\uce68\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<ul>\n<li>\uacf5\uae30\uac00 \uc5c6\ub294 \ud658\uacbd: TMA\ub294 \uc2b5\uae30 \ubc0f \uc0b0\uc18c\uc640\uc758 \ubc18\uc751\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uacf5\uae30\uac00 \uc5c6\ub294 \ud658\uacbd\uc5d0\uc11c \ucde8\uae09\ud574\uc57c \ud569\ub2c8\ub2e4. \uae00\ub7ec\ube0c\ubc15\uc2a4 \ub610\ub294 \uc9c8\uc18c\ub098 \uc544\ub974\uace4\uacfc \uac19\uc740 \ubd88\ud65c\uc131 \uac00\uc2a4 \ubd84\uc704\uae30\uc5d0\uc11c \uc791\uc5c5\ud558\uc5ec \uc0b0\uc18c\uc640 \uc2b5\uae30\uac00 \uc5c6\ub294 \ubd84\uc704\uae30\ub97c \uc720\uc9c0\ud558\uc2ed\uc2dc\uc624.<\/li>\n\n\n\n<li>\ubcf4\ud638 \uc7a5\ube44: TMA\ub97c \ucde8\uae09\ud560 \ub54c\ub294 \ud56d\uc0c1 \ub0b4\ud654\ud559\uc131 \uc7a5\uac11, \ubcf4\uc548\uacbd \ub610\ub294 \uace0\uae00, \uc2e4\ud5d8\uc2e4 \uac00\uc6b4 \ub610\ub294 \ubcf4\ud638\ubcf5, \uc55e\uc774 \ub9c9\ud78c \uc2e0\ubc1c\uc744 \ud3ec\ud568\ud55c \uc801\uc808\ud55c \uac1c\uc778 \ubcf4\ud638 \uc7a5\ube44(PPE)\ub97c \ucc29\uc6a9\ud558\uc2ed\uc2dc\uc624. PPE\ub294 \ud53c\ubd80 \uc811\ucd09 \ubc0f \uc7a0\uc7ac\uc801\uc778 \ud290\uc73c\ub85c\ubd80\ud130 \ubcf4\ud638\ud558\ub294 \uc7a5\ubcbd \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uacf5\uae30 \uc5c6\ub294 \uc6a9\uae30: TMA\ub294 \uacf5\uae30\uac00 \uc5c6\ub294 \uc6a9\uae30\uc5d0 \ubcf4\uad00\ud558\uc5ec \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud558\uc2ed\uc2dc\uc624. \uacf5\uae30\uc5d0 \ubbfc\uac10\ud55c \ud654\ud569\ubb3c\uc6a9\uc73c\ub85c \ud2b9\ubcc4\ud788 \uc124\uacc4\ub41c \uc6a9\uae30\ub97c \uc0ac\uc6a9\ud558\uace0 \uacf5\uae30\uc640 \uc2b5\uae30\uac00 \ub4e4\uc5b4\uac00\uc9c0 \uc54a\ub3c4\ub85d \ub2e8\ub2e8\ud788 \ubc00\ubd09\ud558\uc2ed\uc2dc\uc624.<\/li>\n\n\n\n<li>\ud638\ud658\uc131: TMA\ub97c \ubb3c, \uc0b0 \ubc0f \uc0b0\ud654\uc81c\uc640 \uac19\uc740 \ud638\ud658\ub418\uc9c0 \uc54a\ub294 \ubb3c\uc9c8\uacfc \uba40\ub9ac\ud558\uc2ed\uc2dc\uc624. \uc7a0\uc7ac\uc801 \ubc18\uc751 \ubc0f \uc704\ud5d8\uc744 \ud53c\ud558\uae30 \uc704\ud574 \ub2e4\ub978 \ud654\ud559 \ubb3c\uc9c8\uacfc \ubcc4\ub3c4\ub85c \ubcf4\uad00\ud558\uc2ed\uc2dc\uc624.<\/li>\n\n\n\n<li>\ub77c\ubca8\ub9c1: \ubaa8\ub4e0 TMA \uc6a9\uae30\uc5d0 \ub0b4\uc6a9\ubb3c, \uc704\ud5d8 \uc694\uc18c \ubc0f \uc801\uc808\ud55c \ucde8\uae09 \uc8fc\uc758 \uc0ac\ud56d\uc744 \ub098\ud0c0\ub0b4\ub294 \uba85\ud655\ud558\uace0 \ub208\uc5d0 \ub744\ub294 \ub9c8\ud0b9\uc744 \uc801\uc808\ud558\uac8c \ub77c\ubca8\ub9c1\ud558\uc2ed\uc2dc\uc624. \uc774\uac83\uc740 \uc801\uc808\ud55c \uc2dd\ubcc4\uc744 \ubcf4\uc7a5\ud558\uace0 \uc6b0\ubc1c\uc801\uc778 \uc624\uc6a9\uc744 \ubc29\uc9c0\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ubcf4\uad00 \uc870\uac74: TMA\ub294 \uc11c\ub298\ud558\uace0 \uac74\uc870\ud558\uba70 \ud1b5\ud48d\uc774 \uc798 \ub418\ub294 \uacf3\uc5d0 \ubcf4\uad00\ud558\uc2ed\uc2dc\uc624. \uc9c1\uc0ac\uad11\uc120\uc774\ub098 \uc5f4\uc6d0\uc5d0 \ub178\ucd9c\ub418\uc9c0 \uc54a\ub3c4\ub85d \ud558\uc2ed\uc2dc\uc624. \uc5f4\ud654 \ub610\ub294 \uc6d0\uce58 \uc54a\ub294 \ubc18\uc751\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \uc801\uc808\ud55c \uc628\ub3c4 \ubc0f \uc2b5\ub3c4 \uc218\uc900\uc744 \uc720\uc9c0\ud558\uc2ed\uc2dc\uc624.<\/li>\n\n\n\n<li>\ucde8\uae09 \uc8fc\uc758\uc0ac\ud56d: TMA\ub294 \ubc1c\ud654\uc131\uc774 \ub192\uace0 \ubc18\uc751\uc131\uc774 \ub192\uc73c\ubbc0\ub85c \ub9e4\uc6b0 \uc8fc\uc758\ud558\uc5ec \ucde8\uae09\ud558\uc2ed\uc2dc\uc624. \ubb34\uacf5\uae30 \uae30\uc220\uacfc \uc774\uc1a1 \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\uc5ec \uacf5\uae30\uc640 \uc2b5\uae30\uc5d0 \ub300\ud55c \ub178\ucd9c\uc744 \ucd5c\uc18c\ud654\ud558\uc2ed\uc2dc\uc624. \ud56d\uc0c1 \ud1b5\uc81c\ub418\uace0 \ud658\uae30\uac00 \uc798 \ub418\ub294 \ud658\uacbd\uc5d0\uc11c \uc791\uc5c5\ud558\uc2ed\uc2dc\uc624.<\/li>\n\n\n\n<li>\ube44\uc0c1 \ub300\ube44: TMA\uc640 \uad00\ub828\ub41c \uc7a0\uc7ac\uc801 \uc720\ucd9c \ub610\ub294 \uc0ac\uace0\uc5d0 \ub300\ube44\ud558\uc2ed\uc2dc\uc624. \uc801\uc808\ud55c \uc720\ucd9c \ud1b5\uc81c \uc870\uce58, \uc18c\ud654 \uc7a5\ube44 \ubc0f \ube44\uc0c1 \ub300\uc751 \uc808\ucc28\ub97c \ub9c8\ub828\ud558\uc2ed\uc2dc\uc624. \uc9c1\uc6d0\uc774 \uc801\uc808\ud55c \ube44\uc0c1 \ud504\ub85c\ud1a0\ucf5c\uc5d0 \ub300\ud574 \uad50\uc721\uc744 \ubc1b\uc558\ub294\uc9c0 \ud655\uc778\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ud3d0\uae30: \ud604\uc9c0 \uaddc\uc815 \ubc0f \uc9c0\uce68\uc5d0 \ub530\ub77c TMA \ud3d0\uae30\ubb3c \ubc0f \uc624\uc5fc\ub41c \ubb3c\uc9c8\uc744 \ud3d0\uae30\ud558\uc2ed\uc2dc\uc624. \uc801\uc808\ud55c \ud3d0\uae30 \ubc29\ubc95 \ubc0f \uc808\ucc28\uc5d0 \ub300\ud574\uc11c\ub294 \uc9c0\uc5ed \ud3d0\uae30\ubb3c \uad00\ub9ac \ub2f9\uad6d\uc5d0 \ubb38\uc758\ud558\uc2ed\uc2dc\uc624.<\/li>\n<\/ul>\n\n\n\n<p>TMA \ucde8\uae09 \ubc0f \ubcf4\uad00\uc5d0 \ub300\ud55c \uc774\ub7ec\ud55c \uc9c0\uce68\uc744 \uc900\uc218\ud558\ub294 \uac83\uc740 \uc0ac\uace0\ub97c \uc608\ubc29\ud558\uace0 \ud654\ud569\ubb3c\uc758 \uc548\uc815\uc131\uc744 \uc720\uc9c0\ud558\uba70 \uc9c1\uc6d0\uacfc \uc8fc\ubcc0 \ud658\uacbd\uc758 \uc548\uc804\uc744 \ubcf4\uc7a5\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h2 class=\"wp-block-heading has-vivid-cyan-blue-color has-text-color\"><span class=\"ez-toc-section\" id=\"TMATrimethyl_Aluminium%EC%9D%98_%EB%8C%80%ED%91%9C%EC%A0%81%EC%9D%B8_%EC%83%9D%EC%82%B0_%EC%A7%80%EC%97%AD%EA%B3%BC_%EC%83%9D%EC%82%B0%EC%97%85%EC%B2%B4\"><\/span>TMA(Trimethyl Aluminium)\uc758 \ub300\ud45c\uc801\uc778 \uc0dd\uc0b0 \uc9c0\uc5ed\uacfc \uc0dd\uc0b0\uc5c5\uccb4<span class=\"ez-toc-section-end\"><\/span><\/h2>\n\n\n\n<p>TMA\ub294 \uc804 \uc138\uacc4 \ub2e4\uc591\ud55c \ud654\ud559 \uc81c\uc870\uc5c5\uccb4\uc5d0\uc11c \uc0dd\uc0b0 \ubc0f \uacf5\uae09\ub429\ub2c8\ub2e4. \ud2b9\uc815 \uc0dd\uc0b0 \uc9c0\uc5ed\uacfc \uc0dd\uc0b0\uc5c5\uccb4\ub294 \ub2e4\ub97c \uc218 \uc788\uc9c0\ub9cc TMA \uc0dd\uc0b0\uc73c\ub85c \uc54c\ub824\uc9c4 \ub300\ud45c\uc801\uc778 \uc9c0\uc5ed\uacfc \ud68c\uc0ac\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<ul>\n<li>\ubbf8\uad6d: \ubbf8\uad6d\uc758 \uc5ec\ub7ec \ud654\ud559 \uc81c\uc870\uc5c5\uccb4\uc5d0\uc11c TMA\ub97c \uc0dd\uc0b0\ud569\ub2c8\ub2e4. \uc800\uba85\ud55c \ud68c\uc0ac\ub85c\ub294 Albemarle Corporation, Chemtura Corporation \ubc0f Alfa Aesar\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc720\ub7fd: \uc720\ub7fd\uc5d0\ub294 \uc5ec\ub7ec TMA \uc0dd\uc0b0\uc5c5\uccb4\uac00 \uc788\uc2b5\ub2c8\ub2e4. Merck KGaA, Evonik Industries \ubc0f Alfa Aesar\uc640 \uac19\uc740 \ud68c\uc0ac\ub294 \uc720\ub7fd\uc5d0 TMA\ub97c \uc0dd\uc0b0\ud558\ub294 \uc81c\uc870 \uc2dc\uc124\uc744 \ubcf4\uc720\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc911\uad6d: \uc911\uad6d\uc740 TMA\uc758 \uc8fc\uc694 \uc0dd\uc0b0\uad6d\uc73c\ub85c, \uc911\uad6d\uc5d0 \uc5ec\ub7ec \ud654\ud559\ubb3c\uc9c8 \uc81c\uc870\uc5c5\uccb4\uac00 \uc788\uc2b5\ub2c8\ub2e4. Jiangsu NATA Opto-electronic Material Co., Ltd., Shandong Xinghui Chemical Co., Ltd., Jiangsu Bohua Aluminium Industry Co., Ltd.\uc640 \uac19\uc740 \ud68c\uc0ac\uac00 \uc911\uad6d\uc5d0\uc11c TMA \uc0dd\uc0b0\uc5d0 \ucc38\uc5ec\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uc77c\ubcf8: \uc77c\ubcf8 \ud654\ud559 \ud68c\uc0ac\ub3c4 TMA \uc0dd\uc0b0\uc5d0 \uae30\uc5ec. Mitsubishi Gas Chemical Company, Inc. \ubc0f Kanto Denka Kogyo Co., Ltd.\ub294 TMA \uc0dd\uc0b0\uacfc \uad00\ub828\ub41c \uc8fc\ubaa9\ud560\ub9cc\ud55c \uc77c\ubcf8 \uc81c\uc870\uc5c5\uccb4\uc785\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ud55c\uad6d: \ud55c\uad6d\uc5d0\uc11c\ub294 \ucf54\uc624\ub871\uc778\ub354\uc2a4\ud2b8\ub9ac, LG\ud654\ud559 \ub4f1\uc774 TMA\ub97c \uc0dd\uc0b0\ud574 \ub2e4\uc591\ud55c \uc0b0\uc5c5\uad70\uc5d0 \uacf5\uae09\ud558\uace0 \uc788\ub2e4.<\/li>\n<\/ul>\n\n\n\n<p>TMA\uc758 \ud2b9\uc815 \uc0dd\uc0b0 \uc9c0\uc5ed\uacfc \uc0dd\uc0b0\uc790\ub294 \uc2dc\uac04\uc774 \uc9c0\ub0a8\uc5d0 \ub530\ub77c \ubcc0\uacbd\ub420 \uc218 \uc788\uc73c\uba70 \uc0c8\ub85c\uc6b4 \uc0dd\uc0b0\uc790\uac00 \uc2dc\uc7a5\uc5d0 \uc9c4\uc785\ud560 \uc218 \uc788\ub2e4\ub294 \uc810\uc5d0 \uc720\uc758\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \ucd5c\uc2e0 \uc0b0\uc5c5 \uc815\ubcf4\ub97c \ucc38\uc870\ud558\uace0 TMA \uc0dd\uc0b0 \ubc0f \uac00\uc6a9\uc131\uc5d0 \ub300\ud55c \ucd5c\uc2e0 \uc138\ubd80 \uc815\ubcf4\ub294 \ud654\ud559 \uacf5\uae09\uc5c5\uccb4\uc5d0 \ubb38\uc758\ud558\ub294 \uac83\uc774 \uc88b\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n<p>TMA(Trimethyl Aluminium)\ub294 \ub2e4\uc591\ud55c \uc0b0\uc5c5 \ubd84\uc57c\uc5d0\uc11c \uc911\ucd94\uc801\uc778 \uc5ed\ud560\uc744 \ud558\ub294 \ub2e4\ubaa9\uc801 \ubc18\uc751\uc131 \ud654\ud569\ubb3c\uc785\ub2c8\ub2e4. \uadf8\uac83\uc758 \ucd09\ub9e4 \ud2b9\uc131, \ud654\ud559 \uc99d\ucc29\uc5d0 \uad00\uc5ec, \ubc18\ub3c4\uccb4 \uc81c\uc870, \uc81c\uc57d \ud569\uc131 \ubc0f \uc720\uae30 \ud654\ud559\uc5d0\uc11c\uc758 \uc0ac\uc6a9\uc740 \uadf8 \uc911\uc694\uc131\uc744 \uac15\uc870\ud569\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \ubc1c\ud654\uc131 \ubc0f \ubc18\uc751\uc131\uc73c\ub85c \uc778\ud574 TMA\ub97c \uc8fc\uc758\ud574\uc11c \ucde8\uae09\ud558\uace0 \ubcf4\uad00\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \uc801\uc808\ud55c \uc548\uc804 \uc870\uce58 \ubc0f \ubcf4\uad00 \uae30\uc220\uc744 \uc900\uc218\ud568\uc73c\ub85c\uc368 \uc548\uc804\ud55c \uc791\uc5c5 \ud658\uacbd\uc744 \ubcf4\uc7a5\ud558\uba74\uc11c TMA\uc758 \uc7a0\uc7ac\ub825\uc744 \ud6a8\uacfc\uc801\uc73c\ub85c \ud65c\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>TMA(Trimethyl Aluminium): \uc0b0\uc5c5 \uc751\uc6a9 \ubd84\uc57c\uc758 \ud544\uc218 \ud654\ud569\ubb3c TMA\ub85c \uc57d\uce6d\ub418\ub294 \ud2b8\ub9ac\uba54\ud2f8 \uc54c\ub8e8\ubbf8\ub284\uc740 \ud654\ud559\uc2dd Al(CH3)3\uc744 \uac16\ub294 \uc720\uae30 \uae08\uc18d \ud654\ud569\ubb3c\uc785\ub2c8\ub2e4. \uc774\uac83\uc740 \ubc18\uc751\uc131\uc774 \ub192\uace0 \ubc1c\ud654\uc131\uc778 \ubb34\uc0c9 \uc561\uccb4\ub85c, \uacf5\uae30\ub098 \uc2b5\uae30\uac00 \uc788\ub294 \uacf3\uc5d0\uc11c \uc790\ubc1c\uc801\uc73c\ub85c \ubc1c\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. TMA\ub294 \uc8fc\ub85c \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \ubc15\ub9c9 \uc0dd\uc0b0\uc758 \uc804\uad6c\uccb4\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774\ub294 \ubc18\ub3c4\uccb4 \uae30\ud310\uc5d0 \uace0\ud488\uc9c8 \uc54c\ub8e8\ubbf8\ub284 \ud568\uc720 \ud544\ub984\uc744 \uc99d\ucc29\ud558\ub294 \ub370 \uc0ac\uc6a9\ub418\ub294 \uae08\uc18d-\uc720\uae30 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(MOCVD) \uacf5\uc815\uc758 \ud575\uc2ec [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":194,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"jetpack_post_was_ever_published":false,"_jetpack_newsletter_access":"","_jetpack_dont_email_post_to_subs":false,"_jetpack_newsletter_tier_id":0,"_jetpack_memberships_contains_paywalled_content":false,"_jetpack_memberships_contains_paid_content":false,"footnotes":""},"categories":[7,1],"tags":[154,155,164,165,163,158,161,156,160,157,159],"jetpack_sharing_enabled":true,"jetpack_featured_media_url":"https:\/\/i0.wp.com\/freely4000.com\/wp-content\/uploads\/2023\/07\/pexels-photo-954583-e1688831461147.jpeg?fit=1880%2C766&ssl=1","_links":{"self":[{"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/posts\/192"}],"collection":[{"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/comments?post=192"}],"version-history":[{"count":1,"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/posts\/192\/revisions"}],"predecessor-version":[{"id":193,"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/posts\/192\/revisions\/193"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/media\/194"}],"wp:attachment":[{"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/media?parent=192"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/categories?post=192"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/freely4000.com\/wp-json\/wp\/v2\/tags?post=192"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}